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Surface acoustic wave devices for sensor applications
  • ISSN号：1674-4926
  • 期刊名称：《半导体学报：英文版》
  • 时间：0
  • 分类：TP212[自动化与计算机技术—控制科学与工程;自动化与计算机技术—检测技术与自动化装置] U472.9[机械工程—车辆工程;交通运输工程—载运工具运用工程;交通运输工程—道路与铁道工程]
  • 作者机构：[1]Institute of Microelectronics, Tsinghua University, Beijing 100084, China, [2]Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China
  • 相关基金：Project supported by the National Natural Science Foundation of China （Nos. 60936002, 61025021, 61434001, 61574083）, the State Key Development Program for Basic Research of China （No. 2015CB352100）, the National Key Project of Science and Technology （No. 2011ZX02403-002） and the Special Fund for Agroscientific Research in the Public Interest of China （No. 201303107）. M.A.M is addi- tionally supported by the Postdoctoral Fellowship （PDF） program of the Natural Sciences and Engineering Research Council （NSERC） of Canada and the China Postdoctoral Science Foundation （CPSF）.
作者： 刘博, 陈晓, 蔡华林, 穆罕默德·阿里·穆罕默德, 田祥光, 陶璐琪, 杨轶, 任天令
关键词： 传感器应用, 表面声波器件, 声表面波器件, 信号处理单元, 温度传感器, 压力传感器, 生物传感器, 湿度传感器, surface acoustic wave, sensor, sensor application
中文摘要：

Surface acoustic wave(SAW) devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.

英文摘要：

Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.

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期刊信息
  • 《半导体学报：英文版》
  • 中国科技核心期刊
  • 主管单位:中国科学院
  • 主办单位:中国电子学会 中国科学院半导体研究所
  • 主编：李树深
  • 地址：北京912信箱
  • 邮编：100083
  • 邮箱：cjs@semi.ac.cn
  • 电话：010-82304277
  • 国际标准刊号：ISSN：1674-4926
  • 国内统一刊号：ISSN：11-5781/TN
  • 邮发代号:2-184
  • 获奖情况:
  • 90年获中科院优秀期刊二等奖,92年获国家科委、中共中央宣传部和国家新闻出版署...,97年国家科委、中共中央中宣传部和国家新出版署三等奖,中国期刊方阵“双效”期刊
  • 国内外数据库收录:
  • 俄罗斯文摘杂志,美国化学文摘（网络版）,荷兰文摘与引文数据库,美国工程索引,美国剑桥科学文摘,英国科学文摘数据库,日本日本科学技术振兴机构数据库,中国中国科技核心期刊,中国北大核心期刊（2004版）,中国北大核心期刊（2008版）,英国英国皇家化学学会文摘,中国北大核心期刊（2000版）
  • 被引量:7754