中文摘要：

为了对SF。气体的放电过程进行深入研究，使用含电子、正离子、负离子的连续方程对SF6气体的放电过程建模，通过耦合泊松方程进行了解决空间电荷对电场的畸变影响的研究。使用通量校正传输法（Flux—Corrected Transport）求解连续方程，并首次实现了二维情况下的SF6放电过程的动态仿真。模拟过程考虑了带电粒子及中性气体分子的电离、吸附、复合、扩散以及光电离等过程。从仿真结果可见，SF6放电时的电子崩转化成了正、负流注，并且光电离过程加速了流注的发展。通过仿真使得SF6流注放电机制的研究从定性变为定量，这对于进一步研究SF6及相关气体的放电机理具有重要意义。

英文摘要：

Continuity equations for electrons, positive ions, and negative ions are used to establish discharge model in SF6. The electric field distortion caused by space-charged field is settled by coupling Possion＇s equation to the continuity equations. A flux-corrected transport technique is used to solve the continuity equations and a simulation of two-dimensional discharge process in SF6 is realized, which includes ionization, attachment, recombination, diffusion and photoionization. The transition of the electron avalanche into streamer in SF6 is observed during the simulation. The velocities of the anode- and cathode-directed streamers are also calculated. The simulation shows that photoionization accelerates the streamer development.