中文摘要：

研究以贵金属Pd作为掺杂剂的ZnO纳米线敏感元件的乙醇气敏性能.采用水热法在叉指电极上直接制备出具有c轴取向的ZnO多晶纳米线.用SEM,XRD和EDS分析手段观测了材料的微观结构,并对其乙醇气敏性能进行了测试.实验结果表明：对于体积分数为200 ×10-6的乙醇气体,Pd掺杂的ZnO纳米线在灵敏度（8.17）、工作温度（325℃）和响应恢复时间（15,8s）上优于纯的ZnO纳米线.最后,对Pd掺杂的气敏机理进行了讨论.

英文摘要：

The ethanol gas sensitive element properties of ZnO nanowires doped with noble metal of Pd are investigated.The hydrothermal method is used to prepare polycrystalline ZnO nanowires with c axis orientation on interdigital electrodes.The microstructure of nanowires is analyzed by SEM,XRD,and EDS method,meanwhile,ethanol gas sensitive properties of sensors are also investigated.Experimental results indicate that Pd-doped ZnO（Pd-ZnO） nanowires is prior to pure ZnO nanowires on sensitivity（8.17）,operating temperature（325 ℃）,and response and recovery time（15,8 s） for ethanol gas volume fraction 200 ×10-6.At last,gas sensitive mechanism of Pd-doped is discussed.