中文摘要：

采用倾斜3．4°抛光SOI波导端面和在波导端面镀TiO2减反膜的方法，使SOI基动态可调光学衰减器的插入损耗减小了1．6dB，而且回波损耗由8dB提高至57dB，解决了SOI波导器件回波严重这一实用化过程中的关键问题。利用上述方法研制出了完整封装的SOI基可变光学衰减器样品。

英文摘要：

The method to achieve high return loss of SOI-based variable optical attenuator （VOA） is proposed. The end-faces of SOI-based waveguide,on which the antireflcction films of TiO2 are coated, are obliquely polished in 3. 4°. By using this method, the insert loss can be reduced by 1. 6 dB, and the return loss of 56 dB can be achieved. SOI-based VOA devices are packaged for the first time.