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Combined figuring technology for high-precision optical surfaces using deterministic ion beam materi
  • 期刊名称：Optical Engineering Letters
  • 时间：2013.1.1
  • 页码：12133-12133
  • 相关项目：光刻物镜光学零件纳米精度制造基础研究
作者： Wenlin Liao|Yifan Dai|Xuhui Xie|
同期刊论文项目
光刻物镜光学零件纳米精度制造基础研究
期刊论文 46 会议论文 7 获奖 4 著作 1
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