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中文摘要：
在不同温度下利用MOCVD方法生长了ZnO薄膜,并在较高温度下进行了NH3掺杂。采用X射线光电子能谱(XPS)技术分析了薄膜的性质,结果表明,生长温度和N掺杂会影响薄膜的表面吸附、O缺陷、C、H杂质、元素价态、化学键的断裂及晶粒尺寸等性质。440℃低温下生长的薄膜,C、H杂质及O缺陷较多,晶粒尺寸较小。在530℃生长的薄膜中,可以见到由断裂两个键的Zn离子所引起的2p3/2光电子峰。NH3掺杂以后,ZnO薄膜表面O1s峰移向低能侧,而在内部则移向高能侧。
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