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Resolution enhancement optimization methods in optical lithography with improved manufacturability
  • ISSN号：1932-5150
  • 期刊名称：Journal of Micro/ Nanolithography, Mems, and Moems
  • 时间：2011.6.6
  • 页码：023009-
  • 相关项目：超大数值孔径光刻成像与图形保真技术研究
作者： Ma, Xu|Li, Yanqiu|
同期刊论文项目
超大数值孔径光刻成像与图形保真技术研究
期刊论文 70 会议论文 20 专利 75
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