中文摘要：

研究了能量在100到300 ke V区间的低能宽幅电子束从真空引出到空气中的特性。利用EGS5程序模拟了电子束穿过不同厚度钛箔后,在空气中距离钛箔5～10 cm距离处的能量损失、束流损失和束流分布均匀性等。模拟结果显示,对于低能电子,钛箔厚度应该在10μm左右为宜,其透射率与能量直接相关,在距离钛箔5 cm的位置,电子束的分布不均匀度低于±2%,优于工业应用±10%的标准（特殊情况下要求为±5%）,完全满足工业辐照要求。

英文摘要：

In order to investigate the characteristics of extracting low-energy electron beam from vacuum into air, EGS5 is used to simulate the energy loss, beam loss and spatial distribution uniformity at the irradiation position, which is 5 ～ 10 cm to titanium foil with different thickness. The simulation results show that the transmittance is directly related to the incent energy of low-energy electron. When the titanium foil thickness is10 μm, the inhomogeneity about the energy beam spatial distribution is below 5% on the treatment plane 5 cm away from the titanium foil. And totally meet the industrial needs.