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Dynamic force balancing for the sense mode of a silicon microgyroscope
  • ISSN号：0957-0233
  • 期刊名称：Measurement Science and Technology
  • 时间：2013.10.10
  • 页码：0951051-0951059
  • 相关项目：基于弹性波传递效应的杯形波动陀螺设计理论及制造技术研究
作者： Jianbin Su|Dingbang Xiao|Zhihua Chen|Zhanqiang Hou|Xuezhong Wu|
同期刊论文项目
基于弹性波传递效应的杯形波动陀螺设计理论及制造技术研究
期刊论文 21 会议论文 2 专利 2
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