中文摘要：

首次提出一种基于昆虫风速感受器的微型谐振式传感器,用以测量低速气体流动。基于有限元分析提出气体雷诺数与其绕流无限长平板时的粘滞系数的数值关系,给出无限长平板的尺寸对于上述关系的影响。基于上述关系,推导这种微传感器在测量低雷诺数气体流动时的理论模型,得到气体流速与谐振子固有频率偏移的关系。使用有限元分析来评估这种设计,其结果表明,当气体的雷诺数低于1时,这种传感器的输入与输出成线性关系,其灵敏度达到1．6 Hz/（cm·s^-1）。

英文摘要：

A new resonant microsensor based on wind receptor of insect is demonstrated for the first time,which can be used to detect low-velocity gas flow. The relationship between Reynolds number and drag coefficient that determines the resistance when gas passes around infinite long beam is obtained numerically and the effect of the size of the infinite long beam on this relationship is proposed also for the first time. Based on this relationship, the theoretical model of this microsensor is deduced, and the relationship between the velocity of gas flow and the frequency shift of the resonator is obtained. FEA （finite element analysis） is used to evaluate the design, and the result asserts that for the gas with low Reynolds number （typically less than 1 ） the microsensor has excellent linear relationship between the input and output, and its sensitivity is about 1.6 Hz/ （cm·s^-1）.