中文摘要：

提出一种共路干涉装置用于复杂结构亚微米尺度光子准晶的大面积制作.改变样品旋转角度和曝光次数,设计多种不同旋转对称性的准晶结构,并给出相应的衍射模式以证明其多重旋转对称性.利用该装置可以制作任意复杂结构、任意旋转对称度的准晶结构.同时,分析了旋转轴和旋转角存在偏差时对准晶结构的影响.另外,采用该装置实验制作了十重准晶结构,并用原子力显微镜和衍射测量表征该准晶的长程指向性和十重旋转对称性,实验结果表明：十重晶格结构的直径为1.2μm,最小结构单元尺寸为377nm,与理论设计尺寸1.25μm和392.5nm相比,误差为4%.理论设计和实验结果一致性很好,对研究以光子带隙为基础的纳米光子学器件具有重要的指导意义.

英文摘要：

A simple common-path interfering device used for large-area production of complicated photonic quasicrystals in sub-micron scale was presented.The quasicrystalline structures were designed and their diffraction patterns were obtained to prove the multi-fold rotational symmetry.By using the setup,all kinds of quasicrystals with arbitrary complexity and rotational symmetry can be designed and fabricated.Furthermore,ten-fold quasicrystalline structures were produced experimentally.The atomic force microscope measurements and diffraction patterns reveal the long-range directivity and rotational symmetry.The experimental results show that the quasicrystal has a diameter of 1.2μm for a ten-fold lattice and 377 nm for a minimum unit.Compared with the theoretical data 1.25μm and 392.5nm,there is a difference of 4%.A good agreement has been obtained between the experimental and theoretical results.This is promising for the investigation on photonic devices based on the photonic bandgaps.