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中文摘要：
目的构建4级纳米颗粒钛膜实验模型，并评价其表面微观形貌特征。方法采用直流磁控溅射法通过温度控制制备不同大小的纳米颗粒钛膜，采用X射线衍射测试其表面晶粒大小，采用原子力显微镜观察4个温度组（常温、100、250、380℃）Si、Ti基底及未镀膜对照组的表面微观形貌，统计并比较各组颗粒大小，测定各组表面粗糙度大小。结果各组样品表面均形成由密集的圆形或卵圆形颗粒组成的致密薄膜，随温度升高，颗粒大小和晶粒大小均逐渐增大。相对于平整的Si基底，Ti基底的本底形貌对表面膜有较大影响，形成一种复合结构，使Ti基底组的表面粗糙度呈现出随颗粒增大而降低的现象。结论本实验在直流磁控溅射中通过对温度控制而形成不同大小的纳米颗粒钛膜，这种在Ti基底上所形成的复合结构能进一步增大其比表面积。
英文摘要：
Objective To construct four different micro- and nano-phase titanium film models and investigate the characteristics of their surface micro-topography. Methods Four different titanium films were prepared on commercial titanium discs, by direct current magnetron sputtering, at ambient, 100, 250, 380 ℃ substrate temperature, respectively. Their surface topography and crystal sizes were investigated using atomic force microscope （AFM） and X-ray diffraction （XRD）. The size of granule and surface roughness in different group was calculated and compared. Results All samples were covered by a thin film consisting of dense round or ovaloid granules. The granules and crystals was growing as the substrate temperature increasing. The Ti substrate had greater effect on the surface topegraphy of film compared with Si substrate. This kind of complex topography caused the surface roughness of Ti substrate group decreased as the granules growing. Conclusion In our study, four different micro- and nano-phase titanium film models were constructed for our coming investigation of their topographical influence on biological reaction of proteins and cells. Basic data on surface features was obtained for next in vitro and in vivo experiment.
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