中文摘要：

采用磁控溅射在载玻片上制备掺铝氧化锌AZO透明导电薄膜,并用扫描电子显微镜观察薄膜的表面形貌,四探针电阻率测试仪测量样品的方块电阻和电阻率,分光光度计测量薄膜透射率.结果表明当功率、温度、氢气掺杂比为200 W、300℃、8％时,制备的AZO薄膜具有最小的方块电阻和电阻率,且在可见光区域内透射率均超过80％.

英文摘要：

AZO transparent conductive thin films on the glass slide were deposited by magnetron sputtering. The surface morphology of the thin films was analyzed by SEM. Square resistance and resistivity were tested by four point probe resistivity meter. The transmittance of the thin film was measured by spectrophotometer. The result shows that AZO thin films have good electrical and optical properties when the sputtering power, temperature and hydrogen doping ratio are 200 W,300℃ and 8%. The transmittance of the thin film surpasses 80% in the visible region.