中文摘要：

采用紫外脉冲激光沉积（PLD）法制备了0.3Ag-V2O5和LiPON薄膜,结合真空热蒸镀法原位组装0.3Ag-V2O5｜LiPON｜Li薄膜电池。由扫描电镜（SEM）和X射线衍射（XRD）表征了0.3Ag-V2O5和LiPON薄膜形貌与结构,利用恒电流充放电、循环伏安等技术考察了薄膜电池的电化学性能。结果表明,采用PLD方法在O2气氛和N2气氛中分别获得了表面均匀、无针孔、无裂缝、具有非晶态结构的0.3Ag-V2O5和LiPON薄膜。在电压1.0-4.0V,充放电速率2C时,以厚度100nm的0.3Ag-V2O5薄膜为阴极组装的液态电解质电池循环1000次后稳定容量仍为260mAh/g,表现出良好的循环性能。PLD沉积的Li-PON电解质薄膜具有很好的锂离子导电能力,室温离子电导率为1.6×10^-6S/cm,电子电导率〈10^-14S/cm。在电流密度7μA/cm^2,电压1.0-3.5V条件下全固态薄膜锂电池0.3Ag-V2O5│LiPON│Li的循环性能良好,100次循环后的体积比容量达40μAh/（μm.cm^2）。

英文摘要：

0.3Ag-V2Os and LiPON thin films were deposited by pulsed laser deposition （PLD） and a thin film lithium battery 0.3Ag-V2O5 ｜LiPON｜ Li was in situ prepared assisted by vacuum evaporation technology. Thin films＇ structure and morphology were characterized by X-ray diffraction （XRD） and scanning electron microscope （SEM）. The electrochemical properties of battery with liquid or solid electrolyte were examined by chargedischarge and cyclic voltammograms. The results show that both 0.3Ag-V2O5 and LiPON thin films respectively deposited in O2 and N2 ambience possess non-crystal structure with smooth surface, free of pinholes or cracks and strong adhesion to substrate. In a liquid electrolyte of 1.0mol/1 LiPF6 solution, the cell using 0.3Ag-V2O5 with 100nm thickness as the cathode presents high cycle performance. The special capacity is 260mAh/g after 100 cycles at the rate of 2C and cutoff voltage 1.0-4.0V. The LiPON film possesses excellent Li-ion conduction with 1.6×10^-6S/cm ionic conductivity and 〈10^-14S/cm electronic conductivity at room temperature. The all solid state thin film lithium battery 0.3Ag-V2O5 ｜LiPON｜ Li exhibits good charge/discharge cycle performance at a current density 7μA/cm^2 and cutoff voltage 1.0-3.5V, this thin film battery volume special capacity maintains 40μAh/（μm, cm^2） after 100 cycles.