中文摘要：

以熔融淬冷法自制了Tm~（3＋）掺杂Ge-Ga-S硫系玻璃,并以此为基质材料,用漂浮粉料熔融法制备了直径分布为50—200μm的高品质因数（Q〉10~4）的有源硫系玻璃微球谐振腔.在显微镜下优选出一颗表面质量好、球形度较高、直径为72.84μm的微球,与氢氧焰扫描拉锥法制备的一根腰锥直径为1.93μm的石英光纤锥进行近场耦合.根据基质材料的吸收光谱特性,选用808 nm的半导体激光器作为抽运源.实验测得光纤锥倏逝波场激发出了掺Tm~（3＋）硫系玻璃微球在1460 nm附近的荧光回廊模式,其典型共振峰间隔为4.39 nm.实验测得的荧光回廊模式与米氏散射理论计算结果符合度较高（最大误差仅为0.047%）,验证了本文提出的掺Tm~（3＋）硫系微球制备及耦合工艺的可行性.

英文摘要：

Microsphere resonators based on chalcogenide glasses combine the superior optical properties of microsphere resonators（such as high Q-factors and small mode volumes） and excellent material properties of chalcogenide glasses in the infrared spectrum（such as good transmissivities, high refractive indices, and low phonon energies）, and thus have promising applications in the fields of low-threshold infrared lasers, nonlinear Raman amplifiers/lasers, and narrow bandwidth infrared filters.In this work, the infrared microsphere resonators are built by using a novel chalcogenide glass composition of 75 GeS2-15 Ga2S3-10 CsI（Ge-Ga-S）, doped with 1.3 wt% Tm. Compared with previously reported chalcogenide microsphere resonators fabricated with As2S3 and gallium lanthanum sulfide（Ga-La-S） glasses, the proposed Ge-Ga-S glass does not contain the toxic element of As nor the expensive rare earth element of La, and thus is more environmentally friendly and cost-effective for fabricators and users. We first fabricate bulk Ge-Ga-S glasses by using the facility in our laboratory. After measuring the absorption and fluorescence spectra of bulk glasses, they are crushed into powders and the powders are blown downwards through an inert-gas-filled vertical furnace（temperature set at 1000？C）. Molten glass powders are transformed into high-quality microspheres in the furnace due to surface tension. Thousands of microspheres with diameters ranging from 50 to 200 μm can be made in one fabrication process. By using optical microscopy and scanning electron microscopy, a microsphere with high surface quality is selected for further optical characterization.The selected microsphere has a diameter of 72.84 μm, an eccentricity less than 1%（about 80 nm）, and a Q-factor of1.296 × 10~4. A silica fiber taper with a waist-diameter of 1.93 μm is fabricated as the coupling mechanism for the microsphere resonator. The coupling between the microsphere and the micro fiber taper is realized with the aid of nano-positioning sta