中文摘要：

电子吸附过程对于电负性气体的物理特性和化学特性都起着重要的作用。为此,采用脉冲电子源,配合经过优化设计的迁移管,简便有效地实现了大气压下电负性气体电子吸附截面数据的测量。首先对迁移管电场进行了优化设计,接着研究了脉冲电压峰值、迁移管长度和迁移电场强度对到达法拉第板电子数ne0的影响规律;然后探讨了高电负性气样配置的方法,最后测量了几种SF6分解产物的电子吸附截面数据,测量的气体包括SO2、CF4、SOF2、SO2F2和SF6。研究结果表明：所提出的方法能有效地测量电负性气体的电子吸附截面;迁移管中电场的均匀程度主要受迁移环厚度与迁移环间绝缘层厚度之比的影响,该比值越小,电场就越均匀;脉冲峰值电压对到达法拉第板电子数ne0影响不大;在短迁移管情况下,迁移电场强度对ne0有较大影响,在长迁移管情况下则影响不大;电场均匀程度和气样质量浓度是影响测量准确度的主要因素。

英文摘要：

The electron attachment process plays an important part in the physical and chemical characteristics of electronegative gas. The measurement of electron attachment cross-sections for electronegative gas with pulsed electron source and mobility tube by optimal design has been finished simply and conveniently. First, optimal design for mobility tube was done. Then, the influences of pulsed voltage peak, mobility tube length, and mobility electric field on the number ne0 of electron which reached faraday plate were studied. The method of sample gas preparation was discussed. Finally, electron attachment cross-sections of several SF6 decomposition products including SO2, CF4, SOF2, SO2F2 and SF6 were measured. The research results show that the developed method is very simple, convenient, and effective; The uniformity coefficient of electric field in the mobility tube is influenced by the ratio of thickness of mobility ring and distance between ring. The smaller the ratio is,the more uniform the electric field will be. There is little influence pulsed voltage peak on ne0. The shorter the mobility tube is, the stronger the influence of mobility electric field on ne0 will be. The main factors that influence accuracy of measurement are the uniformity coefficient of electric field and the mass concentration of gas sample.