中文摘要：

随着电子器件向小型化和轻便化方向发展，柔性衬底的透明导电薄膜有望成为硬质衬底透明导电薄膜的更新换代产品，因此其研究备受关注。柔性透明导电薄膜ZAO具有优异的光电性能且资源丰富、成本低、对环境无污染，成为当前的研究热点。总结了近年来对柔性衬底材料处理的方法，介绍了柔性透明导电薄膜ZAO的结构和光电特性。评述了柔性ZAO薄膜的研究现状，并对其近期研究和应用工作做了展望。

英文摘要：

With the development of electronic devices toward miniaturizing and handling easily, flexible substrate transparent conducting films have been gained more concern, and it is hopeful to become suecedaneum of hard substrate ones. Owing to its excellent optic-electronic properties, low cost and innocuity, flexible transparent conducting film ZAO has become a focus of research. The treatments of flexible substrate, the micro-structure and properties of ZAO film, the research developments of this material, the future work to be done in ZAO thin film research and application fields were reviewed.