中文摘要：

利用“电子束蒸发沉积薄膜生长技术＋离子束溅射沉积薄膜生长技术”、“HfO2／SiO2＋Al2O3／SiO2＋M—SiO2”复合光学膜系设计技术、400℃×4h高温处理技术，研制的SR-FEL宽带腔镜光学膜系在355nm中心波长的绝对光学反射率测量值为R（355nm）=99．45％，反射光谱带宽测量值为△λ（R≥99．00%）=75nm；研制的355nm／248nm双带腔镜光学膜系，在355nm中心波长，其绝对光学反射率测量值为R（355nm）=99．69％，反射光谱带宽测量值为△λ（R≥99．00％）=59nm；在248nm中心波长，R（248nm）=98．21％，绝对光学反射率光谱带宽测量值△λ（R≥99．00）=9ram，△λ（R≥98．00％）=33nm．

英文摘要：

The cavity mirrors of the storage-ring free-electron laser （SR-FEL） at 355nm and 248nm central wavelengths have been developed with the technologies of electron-beam evaporation deposition and ion-beam sputter deposition. The mirror coatings consists of ＂HfO2/SiO2＋Al203/SiO2＋M-SiO2＂.The absolute reflectance and frequency-tunable range at 355nm are R=99.45% and △λ （R≥99.00%）=75nm, respectively, for the broadband resonator mirror. For the mirror with the dual-central wavelengths, R=99.69% and △λ （R ≥99.00%）=59nm for the first band at 355nm; For the second band at 248nm, R=98.21%, △λ （R ≥99.00%）=9nm and △λ （R≥98.00%）=51nm.