中文摘要：

基于哈特曼波前传感器检测原理,结合图像清晰度定焦技术,提出了一种测量微透镜阵列焦距的方法,介绍了测量系统的组成和原理。首先利用平行光管的出射平面波前在被测微透镜阵列焦面上成像,利用标准透镜产生的球面波前在微透镜阵列焦面附近成像。然后,根据平面波前和球面波前经过微透镜阵列成像时微透镜阵列焦面上光斑的偏移量,计算相应的微透镜阵列子单元的焦距。最后,基于图像清晰度定焦技术,通过不确定度分析和实验测量验证了该方法检测微透镜阵列焦距的可行性。测量结果表明,该方法对微透镜阵列焦距检测精度可达到3%;同时,一次测量可完成微透镜阵列多个子单元的焦距标定。相对于传统的检测方法,该方法具有较高的检测精度和效率。

英文摘要：

A method to measure the focal length of Microlens-Array（MLA） is proposed based on Hartmann-Shack wavefront measurement principle and the Focus Determining Technique by Image Definition（FDTID）.The composition of the measurement system is introduced and the measuring principle is given.Firstly,the plane wavefront from a collimator is imaged nearby the focus of the MLA,and the spherical wavefront induced by the standard lens is also imaged on the focus.Then,the focal length of MLA is calculated by determining the excursion between plane wavefront and spherical wavefront measurements.Finally,an experiment based on the analysis of measurement uncertainty and the application of FDTID is preformed to validate the feasibility of the proposed method.The measuring results demonstrate that the focal length measurement precision is about 3% and several sub-lenses of the MLA can be determined at single shot.It concludes that this method has higher precision and efficiency in the focal length measurement of MLA as compared with traditional methods.