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Self-formation of single-crystal metal particles driven by inhomogeneous stress in thin films
ISSN号:0040-6090
期刊名称:Thin Solid Films
时间:0
页码:5188-5193
相关项目:应变硅/硅锗微细特征单元结构失稳及应变弛豫研究
作者:
Ma, Fei|Sun, Haoliang|Zhan, Jingmei|Xu, Kewei|
同期刊论文项目
应变硅/硅锗微细特征单元结构失稳及应变弛豫研究
期刊论文 18
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