中文摘要：

设计出1种能够模拟基于单晶硅材料微机电器件侧面摩擦副摩擦磨损状况的试验机，有效模拟可动MEMS器件摩擦副之间磨损的真实状况，介绍了试验机测试机构的工作原理并从理论计算及有限元模拟分析2方面对其结构模态进行分析，在超净间内（千级、室温、相对湿度RH约50％），利用光学显微镜、CCD图像采集系统及计算机对梳齿驱动器的谐振频率及摩擦副的动态摩擦系数进行了测试．结果表明：采用所研制的试验机测得的谐振频率为5600，与理论计算及模拟分析的结果（5590和5641）非常接近；摩擦副的动态摩擦系数在0．24～0．35之间；动态摩擦系数随着施加在摩擦副上的正压力变化而变化．

英文摘要：

A single-crystal silicon based on-chip micro-tribotester is designed in order to simulate lateral friction and wear characters for moveable MEMS devices. Working principle is introduced in detail and mode analysis is carried out by means of theoretical calculation and finite element method in order to get resonant frequency of the system. Resonant frequency and dynamic friction coefficient were tested with optical microscopy, CCD image acquisition system and computer in clean booth（ thousand class, room temperature and 50% atmospheric humidity） .The tested natural frequency is 5600, which is close to the theoretical result 5590 and FEM result 5641. Dynamic frictional coefficient of the friction pair is in the range of 0.24 and 0.35. It is verified that with the variation of normal force, dynamic friction coefficient is no longer a constant value.