作者机构:[1]National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200240, China
相关基金:Sponsored by the National High Technology Research and Development Program ( 863 ) of China ( Grant No. 2003AA404210, 2005AA404250, 2003AA404210, 2006AA01Z443).