采用溶胶凝胶自燃烧法,选择不同的烧结温度和镧过量系数,制备出品质各异的La0.5Sr0.5CoO3靶材.分别使用X射线衍射仪(XRD)、环境扫描电子显微镜(ESEM)及四探针测试仪对靶材的成相品质、显微结构和电阻率进行表征.通过对比和分析,确定出最佳工艺为:烧结温度1200℃,镧过量系数0.03.由此制备出物相集中、晶粒均匀且结合致密、杂相及孔洞缺陷少的优质La0.5Sr0.5CoO3靶材.
Different sintering temperatures and the coefficient of excess to La were chosen to prepare the excellent La0.5Sr0.5CoO3targets with the method of sol-gel self-combustion.The quality of the crystallization,microstructure and resistivity of the targets were characterized with the X-ray diffraction(XRD),environmental scanning electron microscopy(ESEM)and four-probe meter,respectively.The optimal sintering temperature and La excess coefficient,1 200℃and 0.03respectively were determined through the comparison and analysis about the results.The targets could own more pure phase,better uniformity of grain,and to be compact with fewer voids.