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中文摘要：
建立了电容临近传感器的三维仿真数学模型，用FEA对不同参数的传感器进行了仿真，比较分析了被测物距离、电极宽度、电极长度间隙比等对传感器灵敏度的影响，并与理论计算进行比较，结果表明：测量系统的灵敏度与电极宽度和电极长度间隙比近似成正比，与被测物距离近似成反比。该研究对电容临近传感器的结构设计有指导意义。
英文摘要：
A three dimensional finite element model for the capacitive proximity sensor is developed. A simulation of different parameters of capacitive sensors has been carried out using FEA. The influence of distance of measured-object, width of electrode and length gap ratio of electrode on sensitivity of sensor and compared with theoretical data. The results show that the sensitivity of the sensor is direct ratio to the width, and the length and gap ratio of electrode, meanwhile, it is inverse ratio to the distance of measured-object. This research has some degree of guiding significance for the structure design of capacitive proximity sensor.
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