中文摘要：

利用非平衡磁控溅射技术在Ti6A14V合金表面制备SiNO薄膜，对不同氮气流量下SiNO薄膜样品的耐磨性和耐蚀性进行研究。结果表明，SiNO薄膜样品具有优异的耐磨性和耐蚀性能。研究认为影响SiNO薄膜性能的主要因素为薄膜中的氮原子百分含量及化合物存在状态。

英文摘要：

The SiNO film has been deposited by unbalance magnetron sputttering（UBMS） on the substrate of Ti6A14V alloy at different N2 gas flow rate. The wear-resistance and anticorrosion properties were studied. The results show that the samples coating with SiNO film have perfect wear-resistance and anticorrosion properties. It is suggested that the N atom content and the compound exist statement significantly affects the properties of the SiNO films.