欢迎您！东篱公司
退出
-
申报数据库
-
立项数据库
-
成果数据库
-
项目获奖数据库
中文摘要：
利用热丝辅助双偏压氢等离子体对化学气相沉积金刚石薄膜进行了纳米尺度上的表面改装，制造出锥状金刚石列阵．金刚石薄膜内在的柱状结构使氢离子在刻蚀薄膜时产生非均匀的刻蚀速率，对锥状表面的形成起着重要作用．另一方面，溅射出的含碳粒子会发生二次沉积，最终的特征表面形貌取决于刻蚀与含碳基团再沉积之间的相互竞争．栅极的使用影响基底区域放电的伏安特性，改变栅极电流可以对形成的金刚石特征表面结构进行有效调节．在处理过程中少量掺入甲烷，提高了金刚石表面附近的含碳基团浓度，促进二次成核，进而诱发均匀分布的锥状列阵．
英文摘要：
The hot filament assisted double-bias hydrogen has been employed for the surface fabrication of the as-formed chemical vapor deposited diamond films on the nanometer scale. Diamond cone arrays are successfully prepared through hydrogen plasma etching. The intrinsic columnar structure of the diamond films leads to the unevenly distributed ion etching rate, which plays an important role in the cone formation. Simultaneously, the carbon-containing species sputtered out may re-deposit on the surface. The evolvement of the characteristic surface is thus determined by the competition between the ion etching and the carbon deposition. The application of grid electrode influences the discharge characteristics at the substrate region. By controlling the grid current, the surface structure of diamond films may be significantly tuned. Moreover, by introducing small amounts of methane in the etching process, the increased concentration of carbon-containing species enhances the secondary diamond nucleation on the film surface, which further promotes the uniformity of the diamond cone arrays.
同期刊论文项目
同项目期刊论文
E?ect of Low-frequency Power on F, CF2 Relative Density and F/CF2 Ratio in Fluorocarbon Dual-Frequen
Effect of C:F Deposition on Etching of SiCOH Low-k Films in CHF3 60 MHz/2 MHz Dual-Frequency Capacit
Effect of high-frequency on etching of SiCOH films in CHF3 dual-frequency capacitively coupled plasm
Formation of SiC Nanostruture Using Hexamethyldisiloxane During Plasma-Assisted Hot-Filament Chemica
Experimental investigation of ion energy distributions in a dual frequency capacitively coupled Ar/C
Fluid simulation for influence of metastable atoms on the characteristics of capacitively coupled ar
Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric ge
Effect of bias in patterning diamond by a dual electron cyclotron resonance–radio-frequency oxygen p
Effects of matching network on the hysteresis during E and H mode transitions in argon inductively c
The parameters of electron cyclotron resonance/radio-frequency hybrid hydrogen plasma adjusted by su
Frequency Matching Effects on Characteristics of Bulk Plasmas and Sheaths for Dual-Frequency Capacit
Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capac
One-Dimensional Fluid Model for Dust Particles in Dual-Frequency Capacitively Coupled Silane Dischar
Spectroscopic study on rotational and vibrational temperature of N2 and N2 + in dual-frequency capac
Response to “Comment on ‘Influence of exciting frequency on gas and ion rotational temperatures of n
Parallelization and optimization of electrostatic Particle-in-Cell/Monte-Carlo Coupled codes as appl
Numerical results for the Ar and CF4 mixture gas in a dual frequency capacitively coupled plasma usi
Influence of the low-frequency source parameters on the plasma characteristics in a dual frequency c
The influence of Exciting Frequency on N2 and N+2 Vibrational Temperature of Nitrogen Capacitively C
Numerical investigation of ion energy distribution and ion angle distribution in a dual-frequency ca
Effect of substrate facets on homoepitaxial growth of diamonds during plasma-assisted hot filament c
Two-dimensional fluid model of pulse sheath in plasma immersion ion implantation with dielectric sub
位置：