中文摘要：

吸合电压是MEMS静电执行器的重要参数，针对RFMEMS开关，详细分析了开关在不同执行方式下的吸合电压．对于执行电压是脉冲方式而言，开关梁受迫振动，不同于准静态方式，此时使开关发生吸合的执行电压为动态吸合电压，计算表明比准静态吸合电压小8％．通过简化的弹性系数和精确的电容计算公式，详细分析了基于CPW的双端固支梁开关的准静态和动态吸合电压．分析了环境阻尼对动态吸合电压的影响，阻尼使得开关的两种吸合电压差别变小．最后分析了射频输入功率对开关吸合电压的影响，射频输入功率会降低吸合电压，如果输入功率足够大，吸合电压将会降为零，此时MEMS开关会发生自执行失效．

英文摘要：

The pull-in voltage of RF MEMS switches at different actuations is presented. When the actuation voltage is a pulse voltage, the movement of the switch beam is in a vibration state rather than quasi-static, so the pull-in voltage is different from the quasi- static condition and is called dynamic pull-in voltage. It is about 92% of the quasi-static pull-in voltage. Following the simple formula of the spring coefficient of a beam and the exact formula of the capacitor for the switch,the quasi-static and dynamic pull-in voltages of the clamped-clamped beam switch on CPW are analyzed, and the damping effect is also included. The damping reduces the difference between the two kinds of pull-in voltages. Finally, the influence of the RF input power on the pull-in voltage is analyzed. The input power decreases the pull-in voltage, reducing the puU-in voltage to zero at a certain power, and then making the switch self-actuate.