利用离散Green函数和有限元等方法对在64°YX—LiNbO3基片上铜短路金属栅阵中漏表面波的传播特性进行了理论研究。给出了不同厚度铜栅条引起的声表面波的色散关系和Coupling-of-Modes耦合模(COM)参数,对其色散特性进行了分析。为研制相应的声表面波器件提供理论支持。
Based on the discrete Green function and the finite element method, properties about surface acoustic waves propagating under periodic Cu grating on 64°YX-LiNbO3 substrate were studied. The dispersion relations of SAW and COM parameters for Cu strips of different thickness are given, which can theoretically support the design of relevant SAW filters.