中文摘要：

针对直立的石墨烯边沿悬挂键易吸附气体分子,影响发射稳定性的问题,本文将石墨烯转移到墙状绝缘结构上,获得石墨烯折角.结合电感耦合等离子体刻蚀和湿法腐蚀法在硅衬底上制得墙状绝缘结构,以石墨烯折角作为场发射尖端,测试研究了石墨烯折角的场发射特性和石墨烯中内导电流对场发射的影响.结果表明：石墨烯折角的场发射开启场强为9.6V/μm;在2 000V阳极电压下,当石墨烯两端偏压从0V增加到10V时,场发射电流从4.5μA增加到15μA.

英文摘要：

Vertical graphene edge is easy to adsorb gas molecules which affects the stability of field emission.The graphene was transferred to insulation wall structure to get the graphene-angle.The insulation wall structure is made on silicon substrate by inductively coupled plasma etching and the method of wet etching,field emission test was made with graphene-angle as field emission tips,and the field emission characteristics of the graphene-angle and the influence of conductive flow on the field emission were studied.The results show that field emission open field strength of graphene-angle is 9.6V/μm.Under the anode voltage 2 000 V,when the bias voltage applied on the both sides of the graphene-angle increases from 0Vto 10 V,the field emission current increases from 4.5μA to 15μA.