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Uncertainty estimation in form error evaluation of freeform surfaces for precision metrology
  • 时间：2015.8
  • 页码：99031G-
  • 相关项目：超精密光学自由曲面面形误差评定算法的研究
作者： Hong Xiao|Hao Zhang|Xiaoying He|Min Xu|
同期刊论文项目
超精密光学自由曲面面形误差评定算法的研究
期刊论文 15 会议论文 4
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