采用HFSS三维仿真模拟软件对加载92%的氧化铝的微波烧结腔进行模拟。通过控制变量法分别改变试样的半径和高度,对试样进行数值化模拟。模拟结果表明,高度在30mm左右时样品内部电场分布比较均匀,为适合烧结的样品尺寸。随着样品高度的增加场的均匀性比逐渐下降。微波电磁场在小尺寸样品内分布比较均匀,场强梯度很小。高度超过60mm后,场的均匀性比有所提高,场的稳定性比略有起伏,但超过一定高度后,样品电场不再均匀,超出均匀区域范围。由此确定了最佳的样品烧结尺寸为高度77mm,半径30mm。
92%Alumina is simulated in the microwave cavity by using the three-dimensional simulation software HFSS.The control variable method is used to simulate the sample by changing the radius and height of the sample.The result indicates that the electric field is uniform when the radius is 30 mm.The sample in this size is fit for sintering.As the height increases,the uniformity of the field decreases.The electric field is uniform when the size of the sample is small.The field intensity is also small.When the height of the sample is over 60 mm,the uniformity of the field is promoted.As the sample is above a certain height,the field is no longer uniform,it will be beyond the uniform area.The best sintering of the sample size is determined to be the radius of 30 mm and the height of 77 mm.