基于粘弹性理论、欧拉-伯努利梁理论以及压电理论,在考虑微结构蠕变现象的情况下,建立了热电耦合场中压电粘弹性微梁的静力坍塌模型及控制方程,研究了压电粘弹性微梁的静力坍塌临界条件,计算和分析了压电层控制电压和温度等参数对微梁结构静力坍塌的影响。研究结果表明:持久坍塌电压可作为压电粘弹性微梁静力坍塌失稳的临界条件,并且温度和压电层控制电压均会对坍塌失稳的临界值造成影响。该文的研究可为MEMS中梁式微结构的设计与优化提供理论参考。
Based on the viscoelastic theory, Euler-Bernoulli beam theory and piezoelectric theory, a static pull-in model and governing equations of piezoelectric viscoelastic microbeams in thermal-electric couple field are developed considering the creep phenomenon of the structure. The pull-in critical conditions of piezoelectric viscoelastic microbeams are studied and the influence of piezoelectric voltage and temperature on the pull-in behaviour is discussed. The results show that the lasting pull-in voltage can be used as the critical condition of the static pull-in instability; the temperature and the control voltage of piezoelectric layers have influence on the critical condition value of static pull-in instability. This paper offers theoretical reference to the design and optimization of beam-type MEMS.