中文摘要：

本文以二氧化铈粉末为研究对象，探讨了不同的电子中和枪条件对光电子能谱数据采集结果的影响。通过与用双阳极Mg靶测试得到的结果比较，确立了用单色器测量电子能谱时比较可靠的中和条件。

英文摘要：

The charge compensation plays a key role in the monochromatic X-ray photoelectron spectroscopy due to the inhomogeneous charging caused by the poor electron conductivity of the insulator sample. In this paper, cerium dioxide powder was analyzed using X-ray photoelectron spectroscopy with different conditions of the charge compensation. Compared with the spectrum obtained by using twin anode （Mg target）, a reliable charge compensation condition using monochromatic X-ray was established.