中文摘要：

快速转向反射镜（FSM）广泛应用于激光束稳定系统、空间光通信系统等领域。采用巨磁致伸缩驱动器（GMA）作为FSM的驱动元件，并对其预压和传动机构进行了一体化优化，设计了一种新型的膜片式柔性上端盖作为预压力施加装置，使其结构更加紧凑的同时增强了位移径向约束；FSM采用四驱动器双驱动轴结构，应用柔性轴方案，对其整体结构进行了优化设计以提高系统谐振频率。建立了FSM有限元模型，对其进行模态分析得到了系统一阶谐振频率及模态振型。对所研制的FSM进行了性能测试，结果表明：系统镜面转角达到±3’，一阶机械谐振频率达到450Hz，模态分析数值与实验值的误差小于10％。

英文摘要：

The fast steering mirror （FSM） system is generally used in laser beam stability system, space optical communication and other fields. The giant magnetostrictive actuator （GMA） was applied on FSM as driving element and the pre-stress and transmission structure optimization of the GMA was studied. In order to make it be compact in structure and improve the displacement constraint at radial directions, a new-style structure, diaphragm upperendcover, was designed to apply the pre-stress. The structure of double axis and four actuators with flexible axis was applied on FSM, and then the structure design of the FSM was optimized to increase the resonant frequency. The three-dimension finite element model for the FSM was built, then the resonant frequency and modal shape of FSM were obtained through the modal analysis. Finally, the performance of FSM was tested. The results show that the operating range of the mirror gets to 3＇ and the first mechanical resonant frequency was over 450 Hz, and the error between the data from the ANSYS model and the experimental data is less than 10%.