中文摘要：

体心立方W膜（110）织构系数T110的变化存在非单调的厚度尺寸效应,这依赖于薄膜中晶粒形核和长大时表面能和应变能的相互作用,薄膜表面结构演变反映了两者的竞争过程.应用小波变换结合分形几何描述薄膜表面结构各向异性行为,用此法构建了薄膜织构系数T110与表面结构各向异性的关系,表明薄膜晶体取向存在表面映射.

英文摘要：

Body-centered cubic （BCC） W films of different thickness were deposited on Si（100） substrate by magnetron sputtering and then annealed in vacuum at 400 ℃ for an hour. An investigation of the crystalline orientation and surface morphology evolution of the annealed W thin films suggests that the.change of film texture coefficient T110 depends on the competition between the strain and surface energy. The surface structure evolution of annealed W thin films of different thickness reflects the competition between the strain energy and the surface energy. In addition, the correlation between the texture coefficient T110 and the surface structure anisotropy of the thin films is established by an approach of integrating the discrete wavelet transform and fractal geometry concepts.