中文摘要：

In this paper,a novel roll-to-roll imprint process is proposed to fabricate gratings in large area. The key challenges in roll-to-roll imprint process,such as the roller mold preparation,imprint system,misalignment of imprint roller and backup roller,and also the imprint pressure,are investigated. Various gratings with different periods and profiles are obtained by the roll-to-roll process. To calibrate the measuring ability of the self-made grating by imprint,a calibration system is built with a dual-frequency laser interferometer. By the calibration,the self-made gratings can achieve ±4μm accuracy in 45mm measuring distance.

英文摘要：

In this paper, a novel roll-to-roll imprint process is proposed to fabricate gratings in large area. The key challenges in roll-to-roll imprint process, such as the roller mold preparation, imprint system, misalignment of im- print roller and backup roller, and also the imprint pressure, are investigated. Various gratings with different peri- ods and profiles are obtained by the roll-to-roll process. To calibrate the measuring ability of the self-made grating by imprint, a calibration system is built with a dual-frequency laser interferometer. By the calibration, the self- made gratings can achieve ±4μ m accuracy in 45 mm measuring distance.