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中文摘要：
提出了一种新型钕铁硼永磁微机器人的制备方案及其“振动一黏滑”运动控制算法．介绍了基于MEMS（微机电系统）技术的图形化光刻法制备永磁微机器人的工艺流程．设计了运动控制驱动线圈系统，并确定了系统空间几何中心处2．5cm见方的均匀磁场强度工作区域．介绍了用于线圈驱动的嵌入式系统的整体设计方案．建立了微机器人的运动模型，然后对“振动一黏滑”运动模式进行了数学仿真，通过实验验证了微机器人的直线2维运动．结果表明，上述无缆驱动微机器人可达10mm／s的平均直线运动速度．
英文摘要：
This paper presents a new method to fabricate permanent magnetic （NdFeB） micro-robot as well as a motion- control algorithm that leads to ＂vibration-slip＂ motion of the micro-robot. MEMS （micro-electro-mechanical system） based graphical photolithography is introduced in robot fabricating process. A customized drive coil system for motion-control is designed. With its uniformly distributed magnetic field, the central cube space inside the coil system with a length of 2.5 cm is set for micro-robot motion. The configuration of the whole embedded system for coil system driving is introduced. A dynamic model of the micro-robot is established, and mathematical simulation of its ＂vibration-slip＂ motion mode is carried out. Linear 2D motion is demonstrated on the micro-robot in experiment. The result indicates that the magnetic micro-robot＇s wireless linear motion speed reaches an average of 10 mm/s.
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