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Fabrication of microlens arrays with varied focal lengths on curved surfaces using an electrostatic
  • ISSN号：0960-1317
  • 期刊名称：Journal of Micromechanics and Microengineering
  • 时间：2014.4.28
  • 页码：0650081-6
  • 相关项目：基于MEMS技术的微型拉曼光谱仪器的研制
作者： 吕苗|
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