中文摘要：

为提高射频微机电开关（RF MEMS SWITCH）的稳定性和可靠性,进一步深入了解接触式射频微机电开关接触特性。基于内聚力原理,运用ABAQUS 6.13建立了薄膜/基底与微悬臂梁间粗糙接触表面的接触-分离模型;动态分析加卸载过程中薄膜/基底接触力、接触位移、破坏变形等变化规律。结果表明：在单次加卸载过程中,薄膜/基底与微悬臂梁间存在多次明显接触-分离现象,并伴随着极大的冲击力,而多次激烈冲击不利于系统的稳定接触性能。在接触过程中,薄膜承受了大部分外载,所受的vonMises等效应力值大于基底受到的von Mises等效应力值。界面层损伤规律表现为明显的阶梯型,且其突变点受冲击力影响。

英文摘要：

In order to improve the stability and reliability of RF MEMS SWITCH, a deeper understanding of contact type RF MEMS switch contact based on the cohesion zone theory was gotten.A contact-separation model of film/substrate and micro canti- lever beam was established using ABAQUS 6.13 based on cohesion principle.The changing rule of loading and unloading process of film/substrate contact force, contacting displacement, deformation damage was dynamically analysed.The results show that there are obvious phenomenon of contact-separation between film/substrate and micro cantilever beam in a single loading and unloading process.It also shows this process is along with a great deal of impact force,which is bad for the stability of the system.In the process of contact,the film is subjected to most of the loads and its vonMises is greater than substrate＇s.The damage law of inter- face layer is characterized by obvious ladder type, and the mutation point is affected by the impact force.