中文摘要：

研究了硅微陀螺仪机械耦合误差的产生机理。以Z轴硅微陀螺仪为研究对象，以动力学方程和矩阵理论为基础，分析了由于加工非理想性产生的不等弹性、阻尼不对称和质量不平衡产生误差的信号，建立了机械耦合误差信号的数学模型，并定量分析了Z轴硅微陀螺仪样品的机械耦合误差信号。结果表明，机械耦合误差信号包含了正交耦合误差和与有用信号同相位的误差信号，其中正交耦合误差为主要误差信号，且主要由不等弹性产生。最后，测试了Z轴硅微陀螺仪的正交耦合误差信号为342．59°／s，且与理论结果相吻合。因此，抑制和补偿正交耦合误差是减小机械耦合误差的关键技术之一。

英文摘要：

The mechanism of mechanical coupling errors of silicon microgyroscopes was studied. For a imperfect machining, the errors caused by the anisoelasticity, asymmetrical damping and the unbal- anced mass of a type of z-axis silicon microgyroscope were analysed based on the dynamic equations and matrix theory. The mathematic models of mechanical coupling errors were put forward, and the numerical results of mechanical coupling errors were given. Analysed results show that the mechanical coupling errors consist of errors in-phase with the useful signals and quadrature errors, and quadrature errors are the largest one,which come from the asymmetrical damping. Finally, the test results show that the quadrature error of a z-axis silicon microgyrscope is 342.59 °/s, which is in accordance with the analytic results. It suggests that restraining and compensating quadrature errors is one of the key technologies to decrease mechanical coupling errors.