中文摘要：

光学表面评价和检测对光学研究，尤其是短波段光学研究具有重要的意义。介绍了短波段掠入射表面散射线性模型，并根据这个理论，建立了软X射线掠入射表面逆散射模型。利用这个数学模型对由软X射线反射率计测得的数据进行计算，得到通过散射测量所获得的样品表面特征值，所测结果与WYKO测量结果吻合。测量结果表明：掠入射软X射线光学散射法能够较为精确地计算出光滑表面粗糙度和表面自相关函数，可以很直观地反应出光学表面形貌特征。

英文摘要：

Evaluation and measurement of surface profiles are very important especially to shortwavelength optical research. A linear system treatment of short-wavelength surface scattering theory is introduced, and based on this, a new inverse scattering mathematical model of soft X-ray grazing incidence optics is established. By using these scattered light distributions of super-smooth surfaces measured by a soft X-ray reflectometer, the surface profiles of super-smooth surfaces are computed by means of inverse scattering mathematical model of soft X-ray grazing incidence optics. The calculating results are in accordance with those measured by WYKO. It can be concluded that the soft X-ray grazing incidence optical scattering method can calculate micro-roughness and surface auto correlation function of smooth surface accurately, and can give optical surface profiles intuitively.