中文摘要：

针对目前微纳定位工作台工作空间密度小的问题,设计了一种新型二自由度对称式并联微纳定位工作台。分析了影响平行四边形位移放大机构变形的主要因素;对直圆柔性铰链、平行板柔性铰链和倒圆角直梁型柔性铰链进行刚度计算;采用能量法和位移矩阵得出平行四边形位移放大机构输出力和载物台运动位移的计算公式;优化平台尺寸,并对优化后的结果进行有限元仿真和实验分析。实验后得到设计平台的工作空间尺寸为143.7μm×142.1μm,工作空间密度可达2.521μm^2/mm^2,与同类型平台相比,能够实现较大的工作空间密度。

英文摘要：

Aiming at the problems of small microstage workspace density, a kind of 2-DOF sym- metrical parallel microstage was put forward herein. First, the main deformation factors were analyzed in the displacement amplifier; second, the stiffnesses of circular flexible hinge, parallel plate flexible hinge and corner-filleted flexible hinge were calculated; third, the energy method and the displace- ment matrix were utilized to get the output force formula of parallelogram displacement amplifier, displacement formula of the stage movement; finally, the variables of microstage were optimized and the optimal results were verified through the simulations and experiments. Results show that the workspace and workspace density may reach to 143.7μm×142.1μm and 2.521μm^2/mm^2, respectively, thus it may realize a higher workspace density.