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中文摘要：
研究CSD技术制备La_3TaO_7（LTO）缓冲层过程中前驱液的热分解行为以及热处理工艺对薄膜取向生长的影响,通过选取恰当的LTO前驱液以及快速升温热处理的方法最终获得了良好c轴织构的LTO薄膜。
英文摘要：
We investigated the influence of the thermal decomposition behavior and the heat-treatment process route on the texture and morphology evolution of the LTO-gel（La_3Ta O_7-gel） buffer layer prepared by CSD.The results show that LTO buffer layer with good c-axis texture and smooth surface could be obtained by choosing the suitable LTO precursor solution and adjusting the rapid elevated temperature processing method.
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