以静压气浮导轨为研究对象,对导轨气浮块底部气体压力的二维分布规律及影响摩擦力的因素进行了理论分析。在气浮块气膜受力分析的基础上,推导了单孔和多孔矩形气浮块底部气体压力的二维分布方程、气浮导轨摩擦力方程,获得了速度与摩擦力之间的关系。以三坐标测量机为实例进行仿真,结果表明高速运行条件下静压气浮导轨的摩擦力降低了三坐标测量机的定位精度,且其对系统运动速度的影响不可忽略。
Aimed at aerostatic guideway,a two dimensional distribution of air pressure and effect factor on the friction force were analyzed under high speed working conditions.The equation of the friction force and the two dimensional air pressure distribution at the bottom of the aerostatic pad with onehole or multi-hole were deduced based on the force analysis of air film.The relationship between the friction force and the speed of the aerostatic guideway was obtained.Under the high speed working conditions,the simulation of the friction force acting on the three-coordinate measuring machine was performed to study the effectiveness on speed precision.The results show that the influence of friction force acting on the aerostatic guideway reduces the position accuracy of the three-coordinate measuring machine,and cannot be ignored under the high speed working conditions.