通过像处理技术分析高分辨电子显微像有助于确定样品结构,提高显微镜的分辨率。本文开发的REW软件同时具有HRTEM像模拟与波函数重构的功能。用户可通过像模拟法来确定已知晶体的结构,另一方面,用户可利用系列离焦的HRTEM像重构样品的出射波函数,从而得到重要的相位信息并提高样品的分辨率。本文将简单介绍REW软件所运用的理论知识,并列举典型例子来描述REW软件的重要功能。
HRTEM image processing is an essential technique for determining the crystal structure and improving the microscope resolution. REW program package for HRTEM simulation and exit wave reconstruction was developed. By HRTEM image simulation, user could confirm the crystal structure by comparing the experimental images with the numerically calculated images. Utilizing the approach of exit wave reconstruction for through-focus images, the phase of the wave at the specimen exit surface could be retrieved and the directly interpretable resolution could be pushed down to the information limit of the microscope. The theories applied in REW is briefly introduced and some typical examples are gaven for demonstrating the REW applications.