采用脉冲激光沉积(PLD)方法在Si(100)衬底上成功制备了具有上下转换的Er∶YbF3转光薄膜。研究发现,所制备的Er∶YbF3转光薄膜实现了上下转换两种机制的结合,能有效地把紫外光和红外光转换到非晶硅太阳能电池最佳响应范围内的656 nm处。进一步分析了衬底温度对薄膜相结构及光学性能影响的物理机制。当衬底温度高于500℃时,薄膜会随着温度的升高而结晶性变强,但有杂相生成。研究结果表明,Er∶YbF3转光薄膜的光学性能在衬底温度为500℃时最佳,有望应用到非晶硅太阳能电池上使其光电效率提高。
The light conversion film Er∶YbF3,which has not only the up-conversion property but also the down-conversion property,was successfully prepared on Si(100) substrat.The effect of substrate temperature on films structural and optical properties was further studied.The results showed that the film achieves combination of up-conversion and down-conversion.It can effectively convert ultraviolet light and near infrared light into 656 nm which is the best response range to amorphous silicon.With increasing temperature,the crystallinity of the films were improved,but when substrate temperature exceeds 500 ℃,the impurity phases are found in the films.These results showed that optical properties of films with 500 ℃ were optimal.Moreover,the light conversion Er∶YbF3 film may improve photoelectric conversion efficiency of amorphous silicon solar cell.