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Chemical mechanical polishing and nanomechanics of semiconductor CdZnTe single crystals
  • ISSN号：0268-1242
  • 期刊名称：Semiconductor Science and Technology
  • 时间：0
  • 页码：105023-105023
  • 语言：英文
  • 相关项目：特殊功能晶体CdZnTe超光滑无损伤化学机械抛光
作者： Hang Gao|Wanqi Jie|Renke Kang|Yan Li|Dongming Guo|Zhenyu Zhang|
同期刊论文项目
特殊功能晶体CdZnTe超光滑无损伤化学机械抛光
期刊论文 9 获奖 10 专利 2
同项目期刊论文
Material removal mechanism of precision grinding of soft-brittle CdZnTe wafers
New deformation mechanism of soft-brittle CdZnTe single crystals under nanogrinding
Nanoscale machinability and subsurface damage machined by CMP of soft-brittle CdZnTe crystals
Nanocutting Process of CdZnTe Single Crystals
Phase transformation of single crystal silicon induced by grinding with ultrafine diamond grits
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软脆功能晶体碲锌镉化学机械抛光
Subsurface crystal lattice deformation machined by ultraprecision grinding of soft-brittle CdZnTe cr