应用无网格光滑粒子流体动力学(SPH)方法,建立了石英玻璃SPH模型,模拟了石英玻璃超精密切削过程,分析了0.1~1.0μm多组切削深度下材料去除模式和应变分布情况,以及不同刀具前角时切削过程中裂纹形成机理及其对超精密加工过程的影响。仿真结果表明:石英玻璃能在微纳尺度上实现塑性域去除。通过研究微裂纹与塑性应变的关系发现:在前角为0°、切削速度10 m/s、刀具钝圆半径0.1μm的仿真条件下,石英玻璃塑脆转变临界切削深度是0.18μm;刀具负前角切削可以得到更好的表面加工质量,说明负前角切削更适合石英玻璃超精密加工。金刚石飞切实验数据验证了SPH仿真结果的合理性。
A smoothing particle hydrodynamics (SPH) model of quartz glass was established to simulate the ultra-precision cutting process of quartz glass by a mesh-free method for SPH. The material removal mode and strain distribution for the cutting depth of 0.1-1.0um were analyzed. The mechanism of crack formation and its influence on the ultra-precision machining process were discussed when the tools of different rake angles were used. The simulated results indicate that quartz glass can be machined in a ductile mode on the micro- and nanoscale. Based on the relation between micro-cracks and plastic strain, the critical cutting depth of brittle-ductile transition is confirmed, and the value is 0.18 lira under given simulated conditions (i.e., rake angle of 0°, cutting speed of 10 rn/s and rounded cutting edge radius of 0.1um. The negative rake angle cutting tool can obtain a better surface quality, showing that the negative rake angle is more suitable for ultra-precision machining of quartz glass. Furthermore, the experimental results of diamond fly cutting is similar to the simulated results by SPH.