中文摘要：

本文采用鼓包法研究金属薄膜的屈服强度，对具有圆形自由窗口的镍薄膜一侧施加压力，薄膜受压变形的全场形貌用数字散斑相关法（DSCM）进行测量，并应用板壳理论分析小挠度变形下膜内应力分布情况。结果表明：圆形薄膜受压时首先从边缘开始屈服，从压力一挠度曲线偏离线性关系的临界点得到金属镍膜的屈服强度为467MPa，这和单轴拉伸法测量所得到的屈服强度值吻合较好。

英文摘要：

In this paper, the bulge test was used to measure the yield strength of nickel thin films. The free-standing thin film was pressured from one side and the out-of-plane deflection was observed by digital speckle correlation method （DSCM）. The stress distribution of the film was analyzed by the shell theory under small deflection. The results show that the yielding started from the edge of circle films, and the yield strength of the nickel film is 467MPa. Uniaxial tensile test demonstrates the accuracy and reliability of the method.