提出并实现了一种基于腔衰荡光谱(CRDS)技术的三参量同时测量的光纤微腔传感器。利用高频CO_2激光脉冲技术在1060nm单模光纤(SMF)上直接刻蚀光学微腔,并将其作为传感单元接入到光纤环谐振腔中,通过测量脉冲激光衰荡时间实现了对温度、折射率和应变3个不同参数的同时传感测量。整个传感器系统采用光时分复用(OTDM)技术,3个带有光纤微腔传感单元的光纤衰荡腔并联连接,共用一个光源和探测器,在3路光纤环中引入不同的相位调制项,使其输出的衰荡信号在时域上有效的分开,从而达到三参量传感的目的。传感器结构合理,可操作性强,后期数据处理工作简单易行,实验结果重复性良好。在此基础之上,可以将此传感器结构推广到四参量,甚至更多参量的传感器系统中。
A three-parameter sensor of fiber micro-cavity based on the cavity ring down spectroscopy (CRDS) technology is proposed and implemented. The micro-cavity on single mode 1060 nm fibers is a- chieved by direct writing with high frequency CO_2 laser pulses. As a sensor unit,the fiber micro-cavity is accessed to the fiber loop resonator. The temperature, the refractive index and the strain are measured at the same time by measuring the ring down time of the pulsed laser. Based on the analysis of optical time domain multiplexing (OTDM) principle and the system configuration, a phase modulation is introduced in different optical ring down cavities. Three optical ring down cavities with fiber micro-cavity are con- nected in parallel, and a common light source and a detector are provided.Therefore, the sensing results of different parameters are output in time sequence, and the detection of three parameters is realized at the same time. This sensor structure is reasonable, the maneuverability is strong, the later data process- ing is simple,and the experimental results are repetitive very well. On this basis,we can extend the sen- sor structure to the four-parameter sensor. The multi-parameter sensor system can be realized even more.